- 129 - GD-70D
14
Replacement Parts List
General Parts Description
Pump 30-1020RK
Tubing nut, ferrule and post, 4 x 6 mm 17-2500RK-01
Tubing nut, ferrule and post, 1/4 x 5/32” 17-2503RK-01
ESU Type Sensor Description
AsH3 (Arsine) 0 - 0.20 ppm sensor
B2H6 (Diborane) 0 - 0.30 ppm sensor ESU-23AY-B2H6
BCl3 (Boron trichloride) 0 - 15.0 ppm sensor ESU-23E-HCL-15
Br2 (Bromine) 0 - 1.00 ppm sensor ESU-K233-BR2
BTBAS (Bis[tertiary-butyl-amino]silane) 0 - 15.0 ppm
CH3COOH (Acetic acid) 0 - 30.0 ppm sensor
CH3NH2 (Methylamine) 0 - 15.0 ppm sensor
CH6Si (Methylsilane) 0 - 20.0 ppm sensor
Cl2 (Chlorine) 0 - 3.00 ppm sensor
ClF3 (Chlorine trifluoride) 0 - 0.60 ppm sensor A type
ClF3 (Chlorine trifluoride) 0 - 0.60 ppm sensor C type
CO (Carbon monoxide) 0 - 75 ppm sensor ESU-23-CO-75
CO (Carbon monoxide) 0 - 75 ppm sensor ESU-231-CO-75
CO (Carbon monoxide) 0 - 150 ppm sensor ESU-23-CO-150
CO (Carbon monoxide) 0 - 150 ppm sensor ESU-231-CO-150
CO (Carbon monoxide) 0 - 300 ppm sensor
CO (Carbon monoxide) 0 - 300 ppm sensor
COF2 (Cobalt difluorine) 0 - 6.00 ppm sensor
COS (Carbonyl sulfide) 0 - 90.0 ppm sensor
DEA (Diethylamine) 0 - 15.0 ppm sensor
DMA (Dimethylamine) 0 - 15.0 ppm sensor
F2 (Fluorine) 0 - 1.00 ppm sensor ESU-K235-F2
F2 (Fluorine) 0 - 3.00 ppm sensor ESU-K233-F2
GeH4 (Germane) 0 - 0.80 ppm sensor ESU-23DH-GEH4
H2Cl2Si (Dichlorosilane) 0 - 15.0 ppm sensor
H2O2 (Hydrogen peroxide) 0 - 3.00 ppm sensor
H2S (Hydrogen sulfide) 0 - 1.00 ppm sensor
H2S (Hydrogen sulfide) 0 - 30.0 ppm sensor
H2Se (Hydrogen selenide) 0 - 0.20 ppm sensor
H9NSi3 (Trisilylamine) 0 - 15.0 ppm sensor
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