- 123 - GD-70D
12-4 Full Scale and Alarm Points
AsH3 (Arsine) 0 - 0.20 ppm 0.05 ppm 0.10 ppm
B2H6 (Diborane) 0 - 0.30 ppm 0.10 ppm 0.20 ppm
BCl3 (Boron trichloride) 0 - 15.0 ppm 5.00 ppm 10.0 ppm
Br2 (Bromine) 0 - 1.00 ppm 0.30 ppm 0.60 ppm
BTBAS (Bis[tertiary-butyl-amino]silane) 0 - 15.0 ppm 5.00 ppm 10.0 ppm
C2H2 (Acetylene) 0 - 2,000 ppm 500 ppm 1,000 ppm
C2H2Cl2 (Dichloroethene) 0 - 600 ppm 200 ppm 400 ppm
C2H4 (Ethylene) 0 - 2,000 ppm 500 ppm 1,000 ppm
C2H5OH (Ethanol) 0 - 2,000 ppm 500 ppm 1,000 ppm
C3H6 (Propylene) 0 - 5,000 ppm 2,000 ppm 4,000 ppm
C3H8 (Propane) 0 - 2,000 ppm 500 ppm 1,000 ppm
0 - 5,000 ppm 2,000 ppm 4,000 ppm
0 - 100% LEL 25% LEL 25% LEL
C4F6 (Hexafluorabutadiene) 0 - 200 ppm 100 ppm 100 ppm
C4H10 (Isobutane) 0 - 100 %LEL 25% LEL 25% LEL
C6H14 (Hexane) 0 - 2,000 ppm 500 ppm 1,000 ppm
CH2Cl2 (Dichloromethane) 0 - 2,000 ppm 500 ppm 1,000 ppm
CH3CN (Acetonitrile) 0 - 2,000 ppm 500 ppm 1,000 ppm
CH3COOH (Acetic acid) 0 - 30.0 ppm 10.0 ppm 20.0 ppm
CH3NH2 (Methylamine) 0 - 15.0 ppm 5.00 ppm 10.0 ppm
CH3OH (Methanol) 0 - 1,000 ppm 250 ppm 500 ppm
0 - 2,000 ppm 500 ppm 1,000 ppm
CH4 (Methane) 0 - 100 %LEL 25% LEL 25% LEL
0 - 2 %volume
(NCU Type)
1.00% 1.00%
0 - 2 %volume
(SGU Type)
0.50% 1.00%
0 - 2,000 ppm 500 ppm 1,000 ppm
0 - 5,000 ppm 2,000 ppm 4,000 ppm
CH6Si (Methylsilane) 0 - 20.0 ppm 5.00 ppm 10.0 ppm
Cl2 (Chlorine) 0 - 3.00 ppm 1.00 ppm 2.00 ppm
ClF3 (Chlorine trifluoride) 0 - 0.60 ppm 0.20 ppm 0.40 ppm
CO (Carbon monoxide) 0 - 75.0 ppm 25.0 ppm 50.0 ppm
0 - 150 ppm 50.0 ppm 100 ppm
0 - 300 ppm 100 ppm 200 ppm