RKI Instruments GD-70D Series - Page 124

GD-70D - 124 -
Detection Gas
Full Scale
Alarm 1
Alarm 2
COS (Carbonyl sulfide) 0 - 2,000 ppm 500 ppm 1,000 ppm
0 - 90.0 ppm 30.0 ppm 60.0 ppm
COF2 (Cobalt difluorine) 0 - 6.00 ppm 2.00 ppm 4.00 ppm
DEA (Diethylamine) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
DMA (Dimethylamine) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
F2 (Fluorine) 0 - 1.00 ppm 0.30 ppm 0.60 ppm
0 - 3.00 ppm 1.00 ppm 2.00 ppm
GeH4 (Germane) 0 - 0.80 ppm 0.20 ppm 0.40 ppm
H2 (Hydrogen) 0 - 100 %LEL 10% LEL 50% LEL
0 - 2.00 %volume
(NCU Type)
1.00% 1.00%
0 - 2.00 %volume
(SGU Type)
0.50% 1.00%
0 - 500 ppm 200 ppm 400 ppm
0 - 1,000 ppm 250 ppm 500 ppm
0 - 2,000 ppm 500 ppm 1,000 ppm
0 - 4,000 ppm 1,000 ppm 2,000 ppm
H2Cl2Si (Dichlorosilane) 0 - 15.0 ppm 5.00 ppm 10.0 ppm
H2O2 (Hydrogen peroxide) 0 - 3.00 ppm 1.00 ppm 2.00 ppm
H2S (Hydrogen sulfide) 0 - 1.00 ppm 0.30 ppm 0.60 ppm
0 - 30.0 ppm 10.0 ppm 20.0 ppm
H2Se (Hydrogen selenide) 0 - 0.20 ppm 0.05 ppm 0.10 ppm
H9NSi3 (Trisilylamine) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
HBR (Hydrogen bromide) 0 - 6.00 ppm 2.00 ppm 4.00 ppm
0 - 9.00 ppm 3.00 ppm 6.00 ppm
HCl (Hydrogen chloride) 0 - 6.00 ppm 2.00 ppm 4.00 ppm
0 - 15.0 ppm 5.0 ppm 10.0 ppm
HCN (Hydrogen cyanide) 0.9 - 15.0 ppm 4.0 ppm 10.0 ppm
HCOOH (Formic acid) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
HF (Hydrogen fluoride) 0.4 - 3.00 ppm 1.00 ppm 2.00 ppm
0.4 - 9.00 ppm 3.00 ppm 6.00 ppm
HNO3 (Nitric acid) 0 - 20.0 ppm 5.0 ppm 10.0 ppm
IPA (Isopropyl alcohol) 0 - 2,000 ppm 500 ppm 1,000 ppm
0 - 100 %LEL 25% LEL 25% LEL
N2O (Nitrous oxide) 0 - 500 ppm 50 ppm 100 ppm
N2H4 (Hydrazine) 0 - 5.00 ppm 1.50 ppm 3.00 ppm
NF3 (Nitrogen trifluoride) 0 - 30.0 ppm 10.0 ppm 20.0 ppm
NH3 (Ammonia) 0 - 75.0 ppm 25.0 ppm 50.0 ppm