RKI Instruments GD-70D Series - Page 125

- 125 - GD-70D
Detection Gas
Full Scale
Alarm 1
Alarm 2
NO (Nitric oxide) 0 - 100 ppm 5 ppm 10 ppm
NO2 (Nitrogen dioxide) 0 - 9.00 ppm 3.00 ppm 6.00 ppm
0 - 15.0 ppm 5.0 ppm 10.0 ppm
O2 (Oxygen) 0 - 5.00% 4.00% 4.00%
0 - 25.0% 18.0% 18.0%
O3 (Ozone) 0 - 0.60 ppm 0.20 ppm 0.40 ppm
0 - 1.00 ppm 0.30 ppm 0.60 ppm
PH3 (Phosphine) 0 - 1.00 ppm 0.30 ppm 0.60 ppm
R32 (Difluoromethane) 0 - 2,000 ppm 500 ppm 1,000 ppm
0 - 5,000 ppm 2,000 ppm 4,000 ppm
0 - 9,000 ppm 5,000 ppm 9,000 ppm
R41 (Fluoromethane) 0 - 2,000 ppm 500 ppm 1,000 ppm
TEOS (Tetraethyl orthosilicate) 0 - 15.0 ppm 10.0 ppm 10.0 ppm
TMA (Trimethylamine) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
TMB (Trimethoxy borane) 0 - 1000 ppm 800 ppm 800 ppm
TMS (Tetramethyl silane) 0 - 15.0 ppm 10.0 ppm 10.0 ppm
TRIMS (Trimethyl silane) 0 - 15.0 ppm 10.0 ppm 10.0 ppm
Si2H6 (Disilane) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
SiCl4 (Silicon tetrachloride) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
SiH4 (Silane) 0 - 15.0 ppm 5.0 ppm 10.0 ppm
SO2 (Sulphur dioxide) 0 - 6.00 ppm 2.00 ppm 4.00 ppm