©2004 TESA Switzerland All Rights Reserved.
Page A-10
User's Manual
MH3D
CCD Optical Probe - Measuring
The optical probe is used primarily to perform measurements in the X-Y plane.
Heights of features in the Z-direction can also be measured. To do this:
1. From the Main Menu, select "Measurements".
2. Focus the probe on the top plane of the feature and take at least 3 measure-
ment points. Press "Done". Verify that the system has solved for a plane. If
not, use the "Change Feature Type" softkey to solve for a plane.
3. Focus on the bottom plane of the feature and take a single measurement
point. Press "Done".
4. Select the "Relationship Mode" softkey to view the Perpendicular Distance
screen.
or,
1. From the Main Menu, select "Height Gage".
2. Select the "Z-Axis" softkey.
3. Focus the probe on the top plane of the feature and take a single measure-
ment point. Press "Done".
4. Focus on the bottom plane of the feature and take a single measurement
point. Press "Done".
5. The lower section of the screen now displays the distance along Z.
Use the highest practical magnification during this procedure for the best
accuracy.
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