上海维宏电子科技股份有限公司
SHANGHAI WEIHONG ELECTRONIC TECHNOLOGY CO., LTD.
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5.3 External Device Parameters
This section introduces parameters of external device under External Device
category, including the following:
• 3.0 Monitoring
• 3.1 Lube
• 3.2 Gas Control
• 3.3 Exhaust
• 3.4 Exchange Workbench
• 3.5 Focus Control
• 3.6 Follow-up
• 3.7 Laser Device
5.3.1 Monitoring
Enable Camera
Whether to enable camera fuction.
Default value: No
5.3.2 Lube
Enable Lubricate
Used to select the mode of lubrication.
0: Not enable lubrication
1: Automatic lubrication
2: Manual lubrication
Default value: 0
Lubricate Len
Distance between lubrication happening
Range: [1, 999999]m
Default value: 100
Lubricate Time
Duration of each lubrication
Range: [1, 100]s
Default value: 5