Polycold Cryochiller Introduction
Installation and Operation Manual Theory of Operation
Brooks Automation
214072 Revision B
1-7
Legend:
A. Polycold Cryochiller Refrigeration Unit
B. Refrigerant line
C. High vacuum valve
D. Cryobaffle
E. Oil diffusion pump
Heat Removal
The Polycold MaxCool Cryochiller is also used in applications requiring high power cooling to temper-
ature as low as -150°C.
There are a wide variety of heat removal applications, but two notable examples include the cooling of
external heat exchangers that chill a gas or a liquid and the cooling of refrigerant-cooled chucks that
control the temperature of semiconductor wafers and other substrates during a manufacturing process
in vacuum. See Figure 1-5.
Figure 1-4: Polycold Cryochiller Used with Optically Opaque Baffle to Minimize Oil Backstreaming
A
B
C
D
E
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