Brooks VX TopCooler - Page 31

Brooks Automation 4. Maintenance and Repair
Part Number: 606325 Rev. A TopCooler Replacement
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Thesystemmaybeusedinanenvironmentwherehazardousmaterialsarepresent,
andsurfacesmaybecontaminatedbythosematerials.
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Whenthisisthecase,refertothefacility’sMaterialSafetyDataSheetsforthose
materialstodetermineproperhandlingandfollowthefacility’sprocedurestocertify
theenvironmentissafe.
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RemovalProcedure
Figure 4-1: Removing the TopCooler
Step Action
1.
Critical Safety Step!
DisconnectthetwoairconnectionsandthecommunicationconnectionattheCableFittingMounton
thetopoftheassembly.Disconnectthegasconnectionsfromthebottomoftheassembly.
Copyright © 2023, Brooks Automation, Inc.
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