Edwards STP-iXL455

STP-iX455/iXL455 Series Instruction Manual
13-3
Table 13.2 Error List
"FAILURE"
LED
(Error message)
Pump
operation
Occurrence
condition
Probable causes Countermeasures
Referred
Section
1 flash
in red
Disturbance X_H
Disturbance Y_H
Disturbance X_B
Disturbance Y_B
Disturbance Z
Decelerate
and stop
Excessive
imbalance
Excessive vibration applied externally to
the STP pump:
1) External vibration/impact. 1) Remove external vibration so as not
to transmit it to the STP pump.
4.3.4
2) Atmospheric air flows into the STP
pump.
2) Check the vacuum piping. 4.3.4
3) Foreign materials fall into the STP
pump.
3) Install the STP pump in a way that
no foreign materials fall into the STP
pump.
4.3.1
4) Sudden pressure change at start of
roughing vacuum by backing-pump.
4) Perform roughing vacuum through
bypass root.
Abnormal magnetic bearing:
1) Control circuit error.
2) Disconnection of the internal wiring.
Contact Service office.
2 flashes
in red
DRV Overload Decelerate
and stop
Acceleration
state
continues for
approx. 15 minutes
1) High pressure at the inlet port. 1) Use the maximum working pressure
or less.
15.1
2) High pressure at the outlet port. 2)
Use the allowable backing pressure or
less.
15.1
3) Leakage of the piping system. 3) Check the vacuum piping system for
leakage.
4.3.4
4) Failure of the backing-pump. 4) Check the backing-pump for its
capacity and START state.
(use a backing-pump with the
recommended capacity or more)
15.1
3 flashes
in red
MOTOR Overheat Decelerate
and stop
Overheating inside
the STP pump
1) Overheating during baking. 1) Set the temperature of the baking
heater to 120 °C or less.
5.1
2) Insufficient cooling. 2) At the time of baking or gas pumping,
always cool the STP pump.
5.2
3) Leakage of the vacuum piping system. 3) Check the piping system for leakage. 4.3.4
4) Repetitive start/stop operations. 4) Repetitious start/stop operations may
cause the STP pump to overheat.
6.2
5) Failure of the air-cooling unit
(optional
accessory)
5) Replace the air-cooling unit 5.2