STP-iX455/iXL455 Series Instruction Manual
4-6
Installation
4.2 Precautions Before Installation
4.2.1 Operating Environment
◇ Check the properties of the gas to be used, referring to the Material Safety Data
Sheet (MSDS) you obtain from the gas supplier. And, keep MSDS and a safety
advice of gas supplier.
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gas. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident
caused by exhaust gas.
◇ Chlorine or fluorine system gases can be used only in corrosion resistant pumps
(type C or other models). When you use gases including alkaline metals, but
excluding Li, gases including Ga, Hg, Sn, or HBr, contact Edwards.
◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
models without anti-corrosion treatment.
◇ If the STP pump is used in an area with radiation, contact Edwards.
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