Edwards STP-iXL455

STP-iX455/iXL455 Series Instruction Manual
4
INTRODUCTION
Thank you very much for purchasing Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust
gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-iX455/iXL455 turbomolecular pump:
Model Name Specification
STP- iX455
Compact type, Integrated control unit,
High-vacuum type
STP- iX455C
Compact type, Integrated control unit,
Corrosion resistant type
*1
STP- iXL455
Compact type, Integrated control unit,
Low-vibration type, High-vacuum type
STP- iXL455C
Compact type, Integrated control unit,
Low-vibration type, High-vacuum type,
Corrosion resistant type
*1
In this manual, the above STP-iX455/iXL455 pump series is collectively referred to as the
"STP pump".
*1
: Corrosion resistant type: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)