Edwards T-STATION 85

Fault nding
The
T-Staon 85 has failed to start
Cause The electrical supply fuse has blown.
Remedy Replace the fuse. Refer to T
able 19 on page 40.
Cause The operang voltage is incorrect.
Remedy Check the voltage supply matches the T-Staon 85 voltage requirements. Refer to the
electric
al rang label located at the rear of the T-Staon 85.
Ulmate pressure cannot be reached
Cause Pressure is limited by water vapour.
Remedy Bake the chamber or run the system for a duraon unl the vacuum improves.
Cause The vacuum gauges are contaminated.
Remedy Clean or replace the vacuum gauges.
Cause Pumping speed is insucient due to poor conductance between the pump and the gauge or
the chamber is t
oo large.
Remedy Increase the conductance or reduce the volume.
Cause The backing pressure is > 10 mbar (1x10
3
P
a).
Remedy The backing pressure may be too high. Check for backing pipeline leaks. If the throughput is
high, a larger backing pump may be required.
Cause The high vacuum area of the system is contaminated.
Remedy Clean the high vacuum system.
Cause Check the rest of the system for leaks and contaminaon.
Remedy If found, repair the leaks and clean the contaminaon.
Cause The inlet pressure is poor.
Remedy If inlet pressure is poor, check the turbo pump for contaminaon and refer to the
Troubleshoong
secon of the turbo pump manual.
Leak test the pump. If the leak rate > 1x10
-7
mbar l s
-1
(1x10
-5
P
a l s
-1
), contact the supplier or
Edwards.
The backing pump is noisy
Cause Listed in Fault Finding secon of the backing pump manual.
Remedy Refer to the Fault Finding secon of the backing pump manual. See General
descripon on
page 10.
The backing pump is leaking oil
Cause Listed in Fault Finding secon of the backing pump manual.
Remedy Refer to the Fault Finding secon of the backing pump manual. See General
descripon on
page 10.
D395-94-880A - Fault nding
Page 28