Edwards T-STATION 85

CAUTION:
Do not use the pump t
o pump gases containing more than 20% oxygen. This will cause the
lubricant to polymerise and the pump to fail prematurely.
Note:
Concentraons of gases may be modied by the compression of the pump.
The turbo pump is designed to pump the following residual gases normally used in high
v
acuum systems:
• Air
• Carbon monoxide
• Neon
• Ethane
• Methane
• Nitrogen
• Krypton
• Argon
• Propane
• Carbon dioxide
• Helium
• Hydrogen
• Butane
The pump can be used to pump oxygen and water vapour, subject to the following condions:
• Oxygen - When the pump is purged by an inert gas, oxygen can be pumped at
concentraons above 20% by volume. Refer to the nEXT85 instrucon manual
(B8G0-00-880) for purge gas specicaon. However, if the pump is not purged, the
oxygen concentraon must be less than 20% by volume.
• Water vapour - Ensure that vapour does not condense inside the pump.
To pump a gas not in the list above, contact the supplier for advice. Failure to contact the
supplier may invalidate the warranty on the pump. The pump is not suitable for pumping
aggressive or corrosive gases.
Venng gas specicaon and vent control data
Although the pump may be vented to atmosphere, high relave humidity of the air may greatly
increase the subsequent pump down me. To reduce pump down mes the pump should be
v
ented with dry, clean gases.
Refer to the nEXT85 turbo pump manual (B8G0-00-880) for the vent valve connecon. Refer to
V
ent valve screen on page 20 for conguring the venng opons.
Table 18
Vent gas specicaon and vent control
Vent gas
specicaon and control Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of parculates 1 μm
D395-94-880A - Technical Reference
Page 39