Parameter Value
Integral fuse
rang 10 A Type T, 20 mm
Backing pump (r
efer to Figure 1 on page 10, item 9)
Outlet socket type IEC60320
Turbomolecular pump (refer to Figure 1 on page 10, item 5)
Connector type 15-way sub-miniature 'D' type socket
Power supply 24 V d.c. nominal
Maximum power rang 4 W
Acve gauge (refer to Figure 1 on page 10, item 6)
Connector type RJ45 8-way
Power supply 24 V d.c. nominal
Maximum power rang 4 W
Figure 14
Pin connecons for 15-way sub-miniature 'D' type socket
Table 20
Turbo pump connector pin-out
Pin Funcon
1 Power supply posive
2 Signal common
3 Start signal output
4 RS232 Tx
5 Serial enable output
6 Power supply posive
7 RS232 Rx
8 Power supply common
9 Speed signal input
10 Screen
11 Power supply posive
12 Screen
13 Power supply common
14 Power supply common
15 Normal signal input
D395-94-880A - Technical Reference
Page 41