Edwards T-STATION 85

List of Tables
T
able 1: Checklist of items........................................................................................................... 11
Table 2: Front panel symbols and their funconsl.......................................................................16
Table 3: Menu items.................................................................................................................... 17
Table 4: Turbo screen key acons................................................................................................ 19
Table 5: Gauge screen key acons...............................................................................................20
Table 6: Vent valve screen........................................................................................................... 21
Table 7: Vent valve screen key acons.........................................................................................21
Table 8: Turbo setpoint screen key acons..................................................................................23
T
able 9: Calibrate gauge screen key acons................................................................................ 24
Table 10: Units screen key acons...............................................................................................24
Table 11: Error numbers.............................................................................................................. 29
Table 12: TAV vent valve kits and adaptor................................................................................... 35
Table 13: Outlet mist lter...........................................................................................................35
Table 14: Operang and storage condions................................................................................36
Table 15: Mechanical data........................................................................................................... 36
Table 16: Pump performance data - nEXT85H.............................................................................37
Table 17: Pump performance data - nEXT85D.............................................................................38
Table 18: Vent gas specicaon and vent control....................................................................... 39
T
able 19: Electrical connecons.................................................................................................. 40
Table 20: Turbo pump connector pin-out....................................................................................41
Table 21: Acve gauge connector pin-out................................................................................... 42
Table 22: Electrical data...............................................................................................................42
D395-94-880A - List of Tables
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