Edwards T-STATION 85

Table 17
Pump performance data - nEXT85D
Turbomolecular pump type nEXT85D ISO63 nEXT85D CF63 nEXT85D NW40
Inlet pumping speed:
Nitrogen 84 ls
-1
84 ls
-1
47 ls
-1
Helium 78 ls
-1
78 ls
-1
61 ls
-1
Hydrogen 60 ls
-1
60 ls
-1
49 ls
-1
Argon 80 ls
-1
80 ls
-1
44 ls
-1
Inlet compression rao:
Nitrogen > 1 E+11 > 1 E+11 > 1 E+11
Helium 8 E+06 8 E+06 8 E+06
Hydrogen 2 E+05 2 E+05 2 E+05
Argon > 1 E+11 > 1 E+11 > 1 E+11
Ulmate pressure:
with rotary vane backing pump
*
< 5 E-09 mbar < 5 E-10 mbar < 5 E-09 mbar
with diaphragm pump
§
< 5 E-08 mbar < 5 E-09 mbar < 5 E-08 mbar
*
Ulmate pressure 48 hours aer bakeout with 2-stage rotary vane backing pump.
§
Ulmate pressure 48 hours aer bakeout with backing pressure < 5 mbar (500 Pa).
Pumped media
WARNING:
V
ent dangerous gases and gas mixtures safely. Do not expose people to these gases. If
pumping hazardous gases or vapours, observe the safety recommendaons of the supplier
of the gas/vapour.
WARNING:
Do not use the pump t
o pump pyrophoric or explosive gas mixtures as it is not suitable for
this purpose. The pump and its connecons are not designed to contain an explosion.
WARNING:
Do not e
xpose any part of the human body to the vacuum as this could result in injury to
or death of people.
CAUTION:
Do not use the pump t
o pump parculates or condensable media. Deposion may occur
within the pump which will degrade pump performance and reduce the pump life.
D395-94-880A - Technical Reference
Page 38