Edwards T-STATION 85

Figure 12
Dimensions - T-Staon 85
All measurements indicated are shown in mm (inches)
Pump perf
ormance data
Table 16
Pump performance data - nEXT85H
Turbomolecular pump type nEXT85H ISO63 nEXT85H CF63 nEXT85H NW40
Inlet pumping speed:
Nitrogen 84 ls
-1
84 ls
-1
47 ls
-1
Helium 78 ls
-1
78 ls
-1
61 ls
-1
Hydrogen 54 ls
-1
54 ls
-1
49 ls
-1
Argon 80 ls
-1
80 ls
-1
44 ls
-1
Inlet compression rao:
Nitrogen > 1 E+11 > 1 E+11 > 1 E+11
Helium 2 E+07 2 E+07 2 E+07
Hydrogen 5 E+05 5 E+05 5 E+05
Argon > 1 E+11 > 1 E+11 > 1 E+11
Ulmate pressure:
with rotary vane backing pump
*
< 5 E-09 mbar < 5 E-10 mbar < 5 E-09 mbar
with diaphragm backing pump
§
< 5 E-08 mbar < 5 E-09 mbar < 5 E-08 mbar
*
Ulmate pressure 48 hours aer bakeout with 2-stage rotary vane backing pump.
§
Ulmate pressure 48 hours aer bakeout with backing pressure < 5 mbar (500 Pa).
D395-94-880A - Technical Reference
Page 37