Edwards T-STATION 85

Fault nding 28
The T-Staon 85 has failed to start...................................................................................28
Ulmate pressure cannot be reached.............................................................................. 28
The backing pump is nois
y................................................................................................28
The backing pump is leaking oil........................................................................................ 28
The turbo pump is very noisy or there is excessive vibraon or both.............................. 29
Error numbers...................................................................................................................29
Storage 31
Disposal 32
Service 33
Spares 34
Accessories 35
TAV vent valve and vent port adaptor (for nEXT85 turbo pump)..................................... 35
Outlet mist lter(for E2M1.5 rotary vacuum pump)........................................................ 35
Technical Reference 36
Operang and storage condions.................................................................................... 36
Mechanical data............................................................................................................... 36
Pump performance data...................................................................................................37
Pumped media................................................................................................................. 38
Venng gas specicaon and vent control data...............................................................39
Materials exposed to gases pumped................................................................................ 40
Electrical connecons....................................................................................................... 40
Electrical data................................................................................................................... 42
D395-94-880A - Contents
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