46
16 PROBE MEASUREMENT PERFORMANCE
Scale Total range Accuracy
a
a.Whichever is the greater. Lower value achieved when calibrated close to the thickness to be measured.
Resolution in range
F1
F1 2 (F1 mode)
FNF1
N1, N1A
0 µm to 1500 µm ±1% to ±3% or ±2.5 µm 0.1 µm
1.0 µm
0 µm to 99.9 µm
100 µm to 1500 µm
0 mil to 60 mils ±1% to ±3% or ±0.1 mil 0.01 mil
0.1 mil
0 mil to 4.99 mils
5 mils to 60 mils
F2
F1 2 (F2 mode)
N2
0 mm to 5.0 mm ±1% to ±3% or ±0.02 mm 1.0 µm
10 µm
0 mm to 0.99 mm
1.0 mm to 5.0 mm
0 mil to 200 mils ±1% to ±3% or ±1 mil 0.1 mil
1mil
0 mil to 49.9 mils
50 mils to 200 mils
F3 0 mm to 13 mm ±1% to ±3% or ±0.05 mm 1.0 µm
10 µm
0 mm to 1.99 mm
2 mm to 13 mm
0 mil to 500 mils ±1% to ±3% or ±2.0 mils 0.1 mil
1mil
0 mil to 99.9 mils
100 mils to 500 mils
FM3
NM3
0 µm to 500 µm ±1% to ±3% or ±2.5 µm 0.1 µm
1.0 µm
0 µm to 99.9 µm
100 µm to 500 µm
0 mil to 10 mils ±1% to ±3% or ±1.0 mil 0.01 mil
0.1 mil
0 mil to 3.99 mils
4 mils to 10 mils
Op_456_2_English.book Page 46 Friday, February 17, 2006 3:35 PM