20
10. Cleanroom Specification
This actuator can deliver performance which ensures its operation in conformance with the requirements of
cleanliness class 10 (0.1μm) by suctioning air into the suction joint. The recommended suction rate of each
model at the maximum speed is specified below.
10.1 Recommended Suction Rate
Model Maximum speed Suction rate (NI/min)
SA5C, lead 12mm 600mm/s 50
SA5C, lead 6mm 300mm/s 30
SA5C, lead 3mm 150mm/s 15
SA6C, lead 12mm 600mm/s 50
SA6C, lead 6mm 300mm/s 30
SA6C, lead 3mm 150mm/s 15
SA7C, lead 16mm 533mm/s 70
SA7C, lead 8mm 266mm/s 40
SA7C, lead 4mm 133mm/s 30
SS7C, lead 12mm 600mm/s 50
SS7C, lead 6mm 300mm/s 30
SS7C, lead 3mm 150mm/s 15
SS8C, lead 20mm 666mm/s 80
SS8C, lead 10mm 333mm/s 40
SS8C, lead 5mm 165mm/s 20
HS8C 1200mm/s 180
• If there is suction equipment, check its capacity. If there is no suction equipment, select suction equipment
such as a vacuum pump and blower by referring to the values above.
10.2 Suction Joint
• As for the suction joint, a one-touch type is employed and its structure allows the joint to be easily connected
with a commercial air tube.
Model Joint type Tube outer diameter
SA5C
SA6C
SA7C
SS7C
KAT08-U01 (SMC) φ8
SS8C
HS8C
KAT12-U03 (SMC) φ12
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