Inficon CU1000

INFICON Gas library | 8
CU1000-Operating-Instructions-jina54en1-09-(2404) 43 / 46
Gas designation
(max. 8 digits)
Other designations Molecular mass
(amu)
Helium viscosity
factor
Hydrogen/mass 3
viscosity factor
O
2
Oxygen 32 1.03 2.299
SF
6
146.1 0.765 1.708
Xe Xenon 131.3 1.153 2.574
ZT130 Galden ZT130 497 1 2.232
Table1: Gas library V3.24