MKS 247D - Page 11

List of Tables
ix
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole......................................................6
Tableau 3 : Définition des symboles apparaissant sur l'appareil ................................................10
Tabla 4 : Definición de los símbolos que aparecen en la unidad................................................14
Table 5: System Interface Cables..............................................................................................20
Table 6: Fuse Information ........................................................................................................30
Table 7: Interface Connector P6 (Channels 1 to 4) Pinout.........................................................32
Table 8: Interface Connector P5 (Channel 1) Pinout .................................................................33
Table 9: MFC Interface Connectors (J1 - J4) Pinout .................................................................34
Table 10: MFC Gauge Factors..................................................................................................47
Table 11: Manual Flow Control - 247 Unit Front Panel Controls..............................................55
Table 12: Ratio Control Set Point Levels..................................................................................61
Table 13: Dipswitch S15 Initial Settings....................................................................................64
Table 14: Dipswitch S15 Settings for +5 V Full Scale Input.....................................................64
Table 15: Dipswitch S15 Settings for +1 V Full Scale Input.....................................................65
Table 16: External Controller - Front Panel Controls................................................................67
Table 17: Gas Correction Factors for Pure Gases......................................................................83