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MKS 247D - Page 7

MKS 247D
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Table of Contents
v
Scaling Control Potentiometers ..................................................................... 43
Decimal Point Selector Switches................................................................... 44
Line Voltage Selector.................................................................................... 44
Fuse.............................................................................................................. 44
AC Line Cord................................................................................................ 44
Interface Connector J6 - Channels 1 to 4 ....................................................... 44
Interface Connector J5 - Channel 1................................................................ 45
MFC Connectors........................................................................................... 45
Scaling Controls ........................................................................................................ 46
Scaling Control Factor................................................................................... 47
Scaling Control Potentiometer....................................................................... 48
Gas Correction Factor (GCF)..................................................................................... 49
How To Calculate the GCF for Pure Gases.................................................... 50
How To Calculate the GCF for Gas Mixtures................................................ 51
Labels........................................................................................................................ 53
Serial Number Label ..................................................................................... 53
Chapter Four: Operation........................................................................................................55
How To Setup the System.......................................................................................... 55
Manual Flow Control................................................................................................. 59
How To Manually Control Individual Gas Flows .......................................... 59
How To Manually Control Ratioed Gas Flows.............................................. 61
External Flow Control ............................................................................................... 63
How To Change the Dipswitch Settings ........................................................ 64
How To Control Individual Gas Flows with an External Controller............... 66
How To Control Pressure with Ratioed Gas Flows........................................ 66
Remote Flow Control ................................................................................................ 69
How To Control Gas Flow with TTL Logic................................................... 69
Chapter Five: Maintenance and Troubleshooting................................................................... 71
General Information................................................................................................... 71
Maintenance .............................................................................................................. 71
How To Clean the Unit ................................................................................. 71
How To Replace the Fuses ............................................................................ 71

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