647C 1. General
9
1.11 Cables
Refer to the instruction manuals of the respective mass flow meters, mass flow controllers and
pressure transducers for cable information. The cables listed for type 647A and 647B are the same
as for the type 647C.
1.12 Service
In case of problems or failure of the device, please contact your local MKS representative. The last
page of this manual contains a list of service and calibration centers.
Fuses
On units with serial number 104783G40 and up the fuses for the ± 15 V supply are accessible on
the rear panel.
Type: TR5-2A
MKS part number: Y0250004
To Next Page
Loading...
