MKS 647C - MFC Connector: CH1 to CH8; PRESSURE Connector

647C 6. Pin Assignment of rear connectors
45
6.4 MFC connector: CH1 to CH8
Sub-D female 15 pol.
--- 1
9 ---
flow signal 2
10 flow feedback
/valve close * 3
11 signal-GND
/valve open * 4
12 signal-GND
PGND 5
13 ---
-15V 6
14 ---
+15V 7
15 chassis
setpoint output 8
* = for use with cable type CB147-1
Figure 27
6.5 PRESSURE connector
Sub-D female 9 pol.
pressure signal 1
6 PGND
pressure setpoint 2
7 reserved
+15V 3
8 reserved
-15V 4
9 AGND
PCS 5
Figure 28