MKS 647C - Pressure Setup

647C 3. Functionality
33
3.9 Pressure Setup
MGC 647C V3.0
PRESSURE 0.0000
RANGE FS. 1.0000 Torr
ZERO VALUE 0.001
ZERO ADJUST EXEC
CONTROLLER STD
GAIN 01.00
INTEG.ACT.[s] 02.00
LEAD [s] 00.30
00 ERRORS FLOW OFF INPUT DIRECT
Figure 23
The 647C supports several pressure ranges listed below:
1.0000 mTorr,
1.0000 Torr,
1.0000 kTorr,
1.0000 µBar,
1.0000 mBar,
1.0000 Bar,
1.0000 Pa,
1.0000 kPa,
10.000 mTorr,
10.000 Torr,
10.000 kTorr,
10.000 µBar,
10.000 mBar,
10.000 Bar,
10.000 Pa,
10.000 kPa,
100.00 mTorr,
100.00 Torr,
100.00 kTorr,
100.00 µBar;
100.00 mBar,
100.00 Bar,
100.00 Pa,
100.00 kPa,
1000.0 mTorr,
1000.0 Torr,
1000.0 µBar,
1000.0 mBar,
1000.0 kPa,
The zero adjust works similar to that of an MFC channel (see chapter “Zero Adjust”, page 20).
Different external pressure controllers such as 250, 152, 153, 652 or 146 type may be used. The
setup must show the applicated controller type. (652 is valid also for 651 controller).
For the parameters of the PID controller see chapter Pressure Control, page 13.