MKS 647C - Technical Specifications

647C 1. General
3
1.5 Technical Specifications
channels for gas flow
- max. number of channels
- input voltage
- output voltage
- error range
- temperature drift
4 (optional 8)
-0.5 ... 5.5 V
-0.5 ... 5.5 V
+/- 1 digit
0.075 % / °C (5)
pressure channel:
- input voltage
- output voltage
- resolution
- error range
- temperature drift
max. 1 channel
-0.5 ... 10 V
-0.5 ... 5 V
16 bit
+/- 3 digit
0.075 % / °C (5)
external setpoint -0.5 ... 5.5 V
measuring rate
output rate
20 Hz / channel
20 Hz / channel
operation temperature
humidity
15 ... 40 °C
< 70 % (3) (4)
Power supply:
- voltage
- fuse
- frequency
- consumed power
power supply for sensors:
- voltages
- max. current per sensor
- max. total current
100 - 240 V
T2 A, 250 V (slow blow)
50 - 60 Hz
200 W
+/- 15 V; +/- 5 %
500 mA (1)
3,3 A (2)
Housing
Rack depth (without connectors)
Total depth with handles mounted
Weight
19” x 3 HE
245 mm
285 mm
5,0 kg 4 channel
5.3 kg 8 channel
(1) Consider also the warm up period of the sensors.
(2) For all channels, i.e. gas flow and pressure
(3) Relative humidity within the specified temperature range.
(4) For use in closed heatable rooms, without condensation.
(5) of max. signal, within the range of operation temperature.
Fuses inside the instruments may only be replaced by service people from MKS Instruments.
Figure 1: Technical Specifications