MKS 647C - Table of Commands

4. Remote Control 647C
36
4.3 Table of Commands
GM s
s = 0
s = 1..5
GM R
FS c xxxx
c = 1..8
x = 0..1100
FS c R
FL c
c = 1..8
x = 0..1100
PS xxxx
x = 0..1100
PS R
PR
x = 0..1100
PC
x = 0..1100
PM m
m = 0
m = 1
PM R
RA c rr
c = 1..8
r = 0..39
Select gas menu
gas menu X, normal setpoints are used
gas menu 1-5
check for gas menu, result: s
enter setpoint of a channel
channel
setpoint in 0.1 percent of full scale
check for setpoint, result: xxxxx
check for actual flow of a channel, result: xxxxx
channel
actual flow in 0.1 percent of full scale
enter pressure setpoint
setpoint in 0.1 percent of full scale
check for pressure setpoint, result: xxxxx
check for pressure, result: xxxxx
actual pressure in 0.1 percent of full scale
check for PCS, result: xxxxx
actual PCS signal in 0.1 percent of full scale
enter pressure mode
mode = off
mode = auto
check for pressure mode, reult: m
enter range
channel
range code:
RA c R
0 = 1.000 SCCM, 20 = 1.000 SCFH
1 = 2.000 SCCM, 21 = 2.000 SCFH
2 = 5.000 SCCM, 22 = 5.000 SCFH
3 = 10.00 SCCM, 23 = 10.00 SCFH
4 = 20.00 SCCM, 24 = 20.00 SCFH
5 = 50.00 SCCM, 25 = 50.00 SCFH
6 = 100.0 SCCM, 26 = 100.0 SCFH
7 = 200.0 SCCM, 27 = 200.0 SCFH
8 = 500.0 SCCM, 28 = 500.0 SCFH
9 = 1.000 SLM, 29 = 1.000 SCFM
10 = 2.000 SLM, 30 = 2.000 SCFM
11 = 5.000 SLM, 31 = 5.000 SCFM
12 = 10.00 SLM, 32 = 10.00 SCFM
13 = 20.00 SLM, 33 = 20.00 SCFM
14 = 50.00 SLM, 34 = 50.00 SCFM
15 = 100.0 SLM, 35 = 100.0 SCFM
16 = 200.0 SLM, 36 = 200.0 SCFM
17 = 400.0 SLM, 37 = 500.0 SCFM
18 = 500.0 SLM, 38 = 30.00 SLM
19 = 1.000 SCMM, 39 = 300.0 SLM
check for range, result: rr
GC c fff enter gas correction factor