MKS 647C - Gas Composition

3. Functionality 647C
28
Truth Table:
Mode Relay # Valve Low limit High limit Relay status
SLEEP
SLEEP
SLEEP
BAND
BAND
BAND
BAND
BAND
LIMIT
LIMIT
LIMIT
LIMIT
1
1
2
1
1
2
2
2
1
1
2
2
OFF
ON
X
OFF
ON
X
X
X
X
X
X
X
X
X
X
X
X
not exceeded
X
exceeded
not exceeded
exceeded
X
X
X
X
X
X
X
not exceeded
exceeded
X
X
X
not exceeded
exceeded
inactive
active
inactive
inactive
active
inactive
active
active
inactive
active
inactive
active
X = any condition
Figure 19
3.7.6 Gas Composition
MGC 647C V3.0
CH1 CH2 CH3 CH4
SET 1 1.000 1.700 0.000 0.000
SET 2 1.010 1.750 0.000 0.000
SET 3 1.020 1.800 0.000 0.000
SET 4 1.040 1.850 0.000 0.000
SET 5 0.000
0.000 0.000 0.000
UNIT SCCM SCCM SLM SLM
STATUS OFF ON ON ON
00 ERRORS FLOW ON INPUT DIRECT
Figure 20
Up to 5 different gas compositions (SET 1 to SET 5) can be defined here, which can be selected in
the menu USER DISPLAY through the item GAS MENU.