MKS 647C - 7 Gas Correction Table

647C 7. Gas Correction Table
47
7. Gas Correction Table
Conversion factors are related to calibration with nitrogen or air.
GAS SYMBOL SPECIFIC HEAT, Cp
cal/g
o
C
DENSITY
g/l @ 0
o
C
CONVERSION
FACTOR
Acetylene
Air
Ammonia
C
2
H
2
- - -
NH
3
0.383
0.240
0.492
1.171
1.293
0.760
0.58
1.00
0.73
Argon
Arsine
Boron Trichloride
Bromine
Ar
AsH
3
BCl
3
Br
2
0.1244
0.1167
0.1279
0.0539
1.782
3.478
5.227
7.130
1.39
1
0.67
0.41
0.81
Carbon Dioxide
Carbon Monoxide
Carbon Tetrachloride
Carbon Tetraflouride
(Freon - 14)
Chlorine
CO
2
CO
CCl
4
CF
4
Cl
2
0.2016
0.2488
0.1655
0.1654
0.1144
1.964
1.250
6.86
3.926
3.163
0.70
1
1.00
0.31
0.42
0.86
Chlorodifluoromethane
(Freon - 22)
Chloropentafluoroethane
(Freon - 115)
Chlorotrifluoromethane
(Freon - 13)
Cyanogen
Deuterium
CHClF
2
C
2
ClF
5
CClF
3
C
2
N
2
D
2
0.1544
0.164
0.153
0.2613
1.722
3.858
6.892
4.660
2.322
0.1799
0.46
0.24
0.38
0.61
1.00
Diborane
Dibromodifluoromethane
B
2
H
6
CBr
2
F
2
0.508
0.15
1.235
9.362
0.44
0.19
Dichlorodifluoromethane
(Freon - 12)
Dichlorofluoromethane
(Freon - 21)
Dichloromethysilane
CCl
2
F
2
CHCl
2
F
(CH
3
)
2
SiCl
2
0.1432
0.140
0.1882
5.395
4.592
5.758
0.35
0.42
0.25
(Table continued on next page)