MKS 647C - ACCESS Connector

6. Pin Assignment of rear connectors 647C
46
6.6 ACCESS connector
Sub-D female 25 pol.
reserved 1
14 external setpoint 1
/valve open 1 2
15 external setpoint 2
/valve close 1 3
16 external setpoint 3
flow signal 1 4
17 external setpoint 4
/valve open 2 5
18 +15V
/valve close 2 6
19 -15V
flow signal 2 7
20 PGND
/valve open 3 8
21 PGND
/valve close 3 9
22 AGND
flow signal 3 10
23 ---
/valve open 4 11
24 ---
/valve close 4 12
25 chassis
flow signal 4 13
Figure 29