MKS 647C - Default Chapter; Table of Contents

647C Contents
iii
Contents
1. General.................................................................................................................................... 1
1.1 The Multi Gas Controller (MGC) Type 647C............................................................ 1
1.2 CE conformity........................................................................................................... 1
1.3 Options .....................................................................................................................2
1.4 Software ................................................................................................................... 2
1.5 Technical Specifications........................................................................................... 3
1.6 Drawings .................................................................................................................. 4
1.6.1 Front Panel............................................................................................... 4
1.6.2 Rear Panel ............................................................................................... 5
1.7 Safety Information .................................................................................................... 6
1.7.1 Symbols Used in this Instruction Manual ................................................. 6
1.7.2 Safety Instructions.................................................................................... 6
1.8 Installation ................................................................................................................7
Powering On...................................................................................................... 7
Powering Off...................................................................................................... 7
1.9 Symbols at the case ................................................................................................. 8
1.10 Accessories ............................................................................................................ 8
1.11 Cables .................................................................................................................... 9
1.12 Service ................................................................................................................... 9
2. Operating Instructions ............................................................................................................. 11
2.1 The User Interface.................................................................................................... 11
2.2 The Menu Tree......................................................................................................... 13
2.3 Reset of System ....................................................................................................... 14
2.4 Display adjustment ................................................................................................... 14
3. Functionality ............................................................................................................................ 15
3.1 The MAIN MENU...................................................................................................... 15
3.2 The USER DISPLAY menu...................................................................................... 15
3.3 The EXTENDED DISPLAY menu ............................................................................ 16
3.4 The PRESSURE CONTROL menu.......................................................................... 17
3.5 Tuning the PID Controller......................................................................................... 18
3.6 Diagnosis of System................................................................................................. 20
3.6.1 The ERROR LISTING menu .................................................................... 20
3.6.2 The SIGNALS menu ................................................................................ 21
3.7 Instrument Setup ...................................................................................................... 21