MKS 647C - Page 4

Contents 647C
iv
3.7.1 Range Selection ....................................................................................... 22
3.7.2 Gas Selection ........................................................................................... 23
3.7.3 Mode Selection......................................................................................... 24
3.7.4 Zero Adjustment ....................................................................................... 26
3.7.5 Trip Limit Supervision............................................................................... 27
3.7.6 Gas Composition...................................................................................... 28
3.8 System Setup ........................................................................................................... 29
3.8.1 RS232 Setup ............................................................................................ 29
3.8.2 System Parameters............................................................................................... 32
3.9 Pressure Setup......................................................................................................... 33
3.10 Information about the System ................................................................................ 34
4. Remote Control ....................................................................................................................... 35
4.1 Compatibility ............................................................................................................. 35
4.2 Command Syntax..................................................................................................... 35
4.3 Table of Commands ................................................................................................. 36
4.4 Response Syntax ..................................................................................................... 39
5. Application of the 647C ........................................................................................................... 41
5.1 Mass Flow Controllers.............................................................................................. 41
5.2 Trouble Shooting ...................................................................................................... 42
6. Pin Assignment of rear connectors ......................................................................................... 43
6.1 RS232 connector...................................................................................................... 43
6.2 Service connector..................................................................................................... 43
6.3 RELAYS connector .................................................................................................. 44
6.4 MFC connector: CH1 to CH8 ................................................................................... 45
6.5 PRESSURE connector............................................................................................. 45
6.6 ACCESS connector.................................................................................................. 46
7. Gas Correction Table .............................................................................................................. 47
INDEX.......................................................................................................................................... 51