647C 5. Application of the 647C
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5. Application of the 647C
5.1 Mass Flow Controllers
The mass flow controllers must have a linear DC voltage output of 0 – 5 V. The input impedance
must not be lower than 1 MOhms. Some mass flow controllers of other manufacturers can be
damaged by a constant set point < 0 V. Other possible symptoms are undesired oscillations, when
the setpoint is varied, or disturbances of the regulation loop.
To operate mass flow controllers it is important, that the allowed maximum of input signals are not
exceeded. The mass flow controllers must have a linear DC voltage input and output of 0 – 5 V.
MKS mass flow meters types 0258A/B/C, 0358B/C , 179A can be operated with the same cables
as for MKS mass flow controllers types 259, 1259, 2259, 1159, 1179A, 2179A, 1479A, 1359, 1559
and 2159.
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