MKS 647C - Rear Panel

647C 1. General
1.6.2 Rear Panel
4/8
3/7
2/6
1/5
10 9
4/8
3/7
2/6
1/5
10 9
I
O
01
02
12
13
11 11
Channel 5 to 8 Channel 1 to 4
01 = Power Supply Connector
02 = Power Switch
1/5 = Channel 1 or 5 for MFC
2/6 = Channel 2 or 6 for MFC
3/7 = Channel 3 or 7 for MFC
4/8 = Channel 4 or 8 for MFC
9 = Connector ACCESS
10 = Connector RELAY
11 = Connector PRESSURE
12 = Connector RS232
13 = Connector SERVICE (to be used only by MKS)
Figure 3: Rear Panel
5