MKS 647C - Page 41

647C 4. Remote Control
37
c = 1..8
f = 10.180
GC c R
MO c m [i]
c = 1..8
m = 0
m = 1
m = 2
m = 3
m = 9
i = 1..8
MO c R
AZ c
c = 1..8
x = -500..500
x = “E5”
HL c xxxx
c = 1..8
x = 0..1100
HL c R
LL c xxxx
c = 1..8
x = 0.1100
LL c R
TM c m
c = 1..8
m = 0
m = 1
m = 2
TM c R
GP c s xxxx
c = 1..8
s = 1..5
x = 0..1100
GP c s R
PZ
x = -500..500
x = “E5”
GT c
c = 0..5
CT R
channel
factor in percent
check for gas correction factor, result: fffff
enter mode
channel
mode = independent
mode = slave
mode = extern
mode = PCS
mode = test
modeindex, reference to master
(only if m equal 1)
check for mode, result: m [i]
zero adjust MFC, result: xxxxx
channel
offset value in mV
error occured
enter high limit
channel
high limit in 0.1 percent of full scale
check for high limit, result: xxxxx
enter low limit
channel
low limit in 0.1 percent of full scale
check for low limit, result: xxxxx
enter mode for trip limits
channel
mode = SLEEP
mode = LIMIT
mode = BAND
check for trip limit mode, result: m
enter setpoint in a gas set
channel
gas set 1 to 5
setpoint in 0.1 percent of full scale
check for setpoint in gas set, result: xxxxx
zero adjust pressure, result: xxxxx
offset value in mV
error occured
pressure controller
controller code
0 = STD (i.e. standard)
1 = 250
2 = 152
3 = ---
4 = 652
5 = 146
check for pressure controller, result: c
PU uu
u = 0..28
pressure unit
unit code: