MKS 647C - Page 23

647C 3. Functionality
Typical Configuration:
MFC 1
MFC 2
MFC n
647C
Baratronprocess
pump
Figure 10
Configuration of a typical system with three flowcontrollers (MFC) plus pressure control with a
Baratron capacitance manometer. No extra pressure control unit is required. The gas flow rates
are kept at a constant ratio.
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