MKS 647C - Page 54

7. Gas Correction Table 647C
50
GAS SYMBOL SPECIFIC HEAT, Cp
cal/g
o
C
DENSITY
g/l @ 0
o
C
CONVERSION
FACTOR
Sulfur Hexafluoride
Trichlorofluoromethane
(Freon - 11)
Trichlorosilane
1,1,2-Trichloro - 1,2,2-Trifluoroethane
(Freon - 113)
Tungsten Hexafluoride
Xenon
SF
6
CCl
3
F
SiHCl
3
CCl
2
FCClF
2
or
(C
2
Cl
3
F
3
)
WF
6
Xe
0.1592
0.1357
0.1380
0.161
0.0810
0.0378
6.516
6.129
6.043
8.360
13.28
5.858
0.26
0.33
0.33
0.20
0.25
1.32
1
Empirically defined
2
Consult MKS Instruments, Inc. for special applications.
NOTE: Standard Pressure is defined as 760 mmHg (1013.25 mbar). Standard Temperature is
defined as 0
o
C.
NOTE: This table may contain more (or less) gases than that of the unit.