37
ZN
System Manual
Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS
Section 3
Feedback Control
• Multi-Clean Sensing System
In this system, the cleanliness of multiple areas is managed by multiple Air Particle
Sensors and multiple Air Clean Units.
The Interface Units acquire the data from the Air Particle Sensors that are connected
together to perform feedback processing on the entire system.
Besides feedback processing on individual Air Particle Sensors, correspondence
between Air Particle Sensor and Air Clean Unit channels and calculation of Air Particle
Sensor data also are possible.
When using multiple Air Particle Sensors or multiple Air Clean Units, configure a multi-clean
sensing system using the ZN-SF12.
Air Clean Unit
Air Particle Sensor
Interface Unit
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