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Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS
ZN
System Manual
Section 3
Feedback Control
■ Multi-Clean Sensing System
• Flow of data for feedback
In a system configured as shown above:
(1) The amount of particles in area 1 is detected by the sensors on channels 1ch and
2ch, and the amount of particles in area 2 is detected by the sensors on channels
3ch and 4ch, the measurement result is calculated by the Amplifier Unit, and the
result is transferred to the Interface Unit.
(2) The controlled air volume level value of each area is calculated based on preset
target values and various feedback parameters, the measurement results sent from
the Air Particle Sensors on channels 1ch to 4ch, and is sent to the Air Clean Units
on channels 1ch and 2ch.
(3) The air volume level is altered according to the controlled air volume level value
that arrives from the Interface Units.
4CH
3CH
2CH
1CH
1CH2CH
ZN-SF21
(1)
(2)
(3)
Air Clean Unit
Air Particle Sensor
Control signal
Area 1
Interface Unit
Area 2
3basic.fm42ページ２００７年６月２８日 木曜日 午前９時１８分
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