Connecting accessory devices
1. Observe the installation instructions in the operating instructions for the relevant accessory.
2. Note the existing configuration of existing connections and control lines.
3. Connect only matching accessory devices to the electronic drive unit.
4. Use the Y-distributor from the Pfeiffer Vacuum range of accessories if you want to connect 3 or 4
devices.
Using additional accessories
1. Observe the installation instructions in the operating instructions for the relevant accessory.
2. Note the existing configuration of existing connections.
3. Use the Pfeiffer Vacuum display and control unit DCU 002, or a DCU with integrated power supply
pack.
5.7 Connecting sealing gas
The use of sealing gas serves to protect the turbopump in dusty processes or with excessive gas
throughputs. Sealing gas prevents the ingress of damaging substances into the motor and bearing area.
The supply is carried out via a sealing gas valve that is included with the scope of delivery.
●
The permissible inlet pressure for sealing gas is 1,500 hPa absolute.
●
The flow rate for sealing gas is at 17.5 to 20 sccm.
Establishing the sealing gas supply
In case you want to use ambient air as sealing gas, the sealing gas valve is ready for operation immedi-
ately.
If you wish to use a different inert gas (e.g. nitrogen N
2
) as the sealing gas, follow the steps below.
1. Provide an external sealing gas supply with a maximum inlet pressure of 1,500 hPa absolute.
2. Connect the sealing gas supply to the inlet side (1/8" thread) of the valve.
3. If required, use a connecting adapter for the valve inlet side (not included in the shipment).
5.8 Connecting the electrical supply
DANGER
Danger to life from electric shock
Touching exposed and voltage-bearing elements causes an electric shock. Improper connection of
the mains supply leads to the risk of touchable live housing parts. There is a risk to life.
►
Before the installation, check that the connection leads are voltage-free.
►
Make sure that electrical installations are only carried out by qualified electricians.
►
Provide adequate grounding for the device.
►
After connection work, carry out an earthed conductor check.
5.8.1 Implement electrical safety measures
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►
Install a mains disconnection device according to SEMI-S2.
►
Install a circuit breaker with an interruption rating of at least 10,000 A.
Absence of emergency stop
The vacuum pump is not equipped with an emergency stop device (EMS) or a lock-out de-
vice. The vacuum pump is designed to be integrated into equipment fitted with an emer-
gency stop device.
●
When activated, the EMS of the equipment must switch off the vacuum pump.
Installation
38/74
To Next Page
Loading...
