Installing the mains disconnection device
1. Install a mains disconnection device as a main switch.
2. Specify the mains disconnection device according to SEMI-S2.
3. Use a circuit breaker with an interrupting capacity of at least 10 kA.
5.8.2 Grounding the vacuum pump
Required aids
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Screw M4 × 8
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Shake proof washer M4, if required
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Suitable grounding cable with cable lug size M4
Fig. 24: Example: Connecting the grounding cable
Procedure
1. Use a suitable grounding cable to divert applicative interferences.
2. Route the connection in accordance with locally applicable provisions.
3. Use the turbopump ground terminal (M4 female thread).
5.8.3 Establishing the electric connection
WARNING
Risk of fatal injury due to electric shock on account of incorrect installation
The device's power supply uses life-threatening voltages. Unsafe or improper installation can lead to
life-threatening situations from electric shocks obtained from working with or on the unit.
►
Ensure safe integration into an emergency off safety circuit.
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Do not carry out your own conversions or modifications on the unit.
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
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Only connect mating plugs after the mechanical installation.
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Only switch on the vacuum pump immediately prior to operation.
Installation
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