Pfeiffer Vacuum PMP06021 - Technical Data and Dimensions; General; Technical Data

14 Technical data and dimensions
14.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
Technical data
Maximum values refer exclusively to the input as a single load.
●
Specifications according to PNEUROP committee PN5
●
ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
torque"
●
ISO 21360 2012: “Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 1: General description”
●
ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 4: Turbomolecular vacuum pumps"
●
Ultimate pressure with test dome after 48 h bake out duration
●
Gas throughput with water cooling; backing pump = rotary vane pump (10 m
3
/h)
●
Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
●
Integral leakage rate with 100 % helium concentration, 10 s measurement duration
●
Sound pressure level at distance to vacuum pump = 1 m
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1
1 · 10
-3
100 1 0.1 0.75
bar 1000 1
1 · 10
5
1000 100 750
Pa 0.01
1 · 10
-5
1 0.01
1 · 10
-3
7.5 · 10
-3
hPa 1
1 · 10
-3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10
-3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
Tbl. 20: Conversion table: Pressure units
mbar l/s
Pa m
3
/s
sccm Torr l/s
atm cm
3
/s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m
3
/s
10 1 592 7.5 9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm
3
/s
1.01 0.101 59.8 0.76 1
Tbl. 21: Conversion table: Units for gas throughput
14.2 Technical data
Selection field HiPace® 1200 with
TC 1200, DN 200
ISO-K
HiPace® 1200 with
TC 1200, DN 200
ISO-F
HiPace® 1200 with
TC 1200, DN 200
CF-F
Part number PM P06 000 PM P06 001 PM P06 002
Connection flange (in) DN 200 ISO-K DN 200 ISO-F DN 200 CF-F
Connection flange (out) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF
Final pressure without gas bal-
last
1 · 10
-7
hPa 1 · 10
-7
hPa 5 · 10
-10
hPa
Pumping speed for Ar 1200 l/s 1200 l/s 1200 l/s
Pumping speed for H
2
1100 l/s 1100 l/s 1100 l/s
Technical data and dimensions
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