Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
1.4 Trademark proof 10
2 Safety 11
2.1 General safety information 11
2.2 Safety instructions 11
2.3 Safety precautions 16
2.4 Limits of use of the product 17
2.5 Proper use 17
2.6 Foreseeable improper use 17
2.7 Personnel qualification 18
2.7.1 Ensuring personnel qualification 18
2.7.2 Personnel qualification for maintenance and repair 18
2.7.3 Advanced training with Pfeiffer Vacuum 19
3 Product description 20
3.1 Function 20
3.1.1 Cooling 20
3.1.2 Rotor bearing 20
3.1.3 Drive 20
3.2 Scope of delivery 20
3.3 Identifying the product 21
3.3.1 Product types 21
3.3.2 Product features 21
4 Transportation and Storage 22
4.1 Transport 22
4.1.1 Transport in vertical position 22
4.1.2 Transport in horizontal space 23
4.2 Storage 24
5 Installation 25
5.1 Preparatory work 25
5.2 Connecting the high vacuum side 26
5.2.1 Requirements for the dimensioning of a counter flange 26
5.2.2 Considering earthquake protection 26
5.2.3 Using a splinter shield or protective screen 27
5.2.4 Using the vibration compensator 27
5.2.5 Mounting orientations 28
5.2.6 Attaching ISO-K flange onto ISO-K 29
5.2.7 Attaching ISO-K flange to ISO-F 29
5.2.8 Attaching ISO-F flange to ISO-F 31
5.2.9 Attaching CF flange to CF-F 32
5.3 Filling the operating fluid 34
5.4 Connecting the fore-vacuum side 35
5.5 Connecting the cooling water supply 36
5.6 Connecting accessories 37
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