5.7 Connecting sealing gas 38
5.8 Connecting the electrical supply 38
5.8.1 Implement electrical safety measures 38
5.8.2 Grounding the vacuum pump 39
5.8.3 Establishing the electric connection 39
6 Operation 41
6.1 Commissioning 41
6.2 Operating modes 42
6.2.1 Operation without operating unit 42
6.2.2 Operation via connection "E74" 42
6.2.3 Operation via multi-function connection "remote" 42
6.2.4 Operation via Pfeiffer Vacuum display and control unit 42
6.2.5 Operation via field bus 42
6.3 Switching on the turbopump 43
6.4 Operation monitoring 43
6.4.1 Operating mode display via LED 43
6.4.2 Temperature monitoring 44
6.5 Switching off and venting 44
6.5.1 Switching off 44
6.5.2 Venting 44
7 Maintenance 46
7.1 General maintenance information 46
7.2 Maintenance intervals and responsibilities 46
7.3 Changing the operating fluid 47
7.3.1 Draining the operating fluid 47
7.3.2 Filling the operating fluid 48
7.4 Replacing the electronic drive unit 49
7.4.1 Removing electronic drive unit 50
7.4.2 Installing the electronic drive unit 51
7.4.3 Confirming the speed specification 52
8 Decommissioning 53
8.1 Stillsetzen für längere Zeit 53
8.2 Recommissioning 53
9 Recycling and disposal 55
9.1 General disposal information 55
9.2 Dispose of turbopumps 55
10 Malfunctions 56
11 Service solutions by Pfeiffer Vacuum 58
12 Spare parts 60
13 Accessories 61
13.1 Accessory information 61
13.2 Ordering accessories 61
14 Technical data and dimensions 64
14.1 General 64
14.2 Technical data 64
14.3 Dimensions 70
Declaration of conformity 72
Table of contents
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