Pfeiffer Vacuum PMP06021

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*PT0564*

ed. A - Date 2012 - P/N:PT0564BEN

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Table of Contents3
About this Manual7
Validity7
Applicable Documents7
Variants7
Target Group7
Conventions8
Instructions in the Text8
Pictographs8
Stickers on the Product8
Abbreviations9
Tbl. 1: Stickers on the Product9
Fig. 1: Position of the Labels on the Product9
Trademark Proof10
Tbl. 2: Abbreviations Used in this Document10
Safety11
General Safety Information11
Safety Instructions11
Safety Precautions16
Limits of Use of the Product17
Proper Use17
Foreseeable Improper Use17
Tbl. 3: Permissible Ambient Conditions17
Personnel Qualification18
Ensuring Personnel Qualification18
Personnel Qualification for Maintenance and Repair18
Advanced Training with Pfeiffer Vacuum19
Product Description20
Function20
Cooling20
Rotor Bearing20
Drive20
Scope of Delivery20
Fig. 2: Design Hipace 1200 Standard and U Version20
Identifying the Product21
Product Types21
Product Features21
Tbl. 4: Product Designation of Pfeiffer Vacuum Hipace Turbopumps21
Tbl. 5: Turbopump Features21
Tbl. 6: Delivered Drive Power Depending on the Supplied Mains Voltage21
Transportation and Storage22
Transport22
Transport in Vertical Position22
Transport in Horizontal Space23
Fig. 3: Slinging Points for Vertical Transport of the Turbopump Without Packaging23
Storage24
Fig. 4: Slinging Points for Horizontal Transport of the Turbopump Without Packaging24
Installation25
Preparatory Work25
Connecting the High Vacuum Side26
Requirements for the Dimensioning of a Counter Flange26
Considering Earthquake Protection26
Tbl. 7: Requirements for the Dimensioning of Customer-Specific High Vacuum con26
Using a Splinter Shield or Protective Screen27
Using the Vibration Compensator27
Tbl. 8: Behavior of Pumping Speed When Using a Splinter Shield or Protective Screen27
Fig. 5: Example: Secure against Displacement and Tipping Caused by External VI27
Mounting Orientations28
Fig. 6: Mounting Orientations of the Standard Version, Upright28
Fig. 7: Mounting Orientations of the U Version, Overhead28
Fig. 8: Alignment of the Fore-Vacuum Connection with Horizontal Mounting Orienta28
Attaching ISO-K Flange Onto ISO-K29
Attaching ISO-K Flange to ISO-F29
Fig. 9: Flange Connection ISO-K to ISO-F, Bracket Screws29
Fig. 10: Flange Connection ISO-K to ISO-F, Hexagon Head Screw and Tapped Hole30
Fig. 11: Flange Connection ISO-K to ISO-F, Stud Screw and Tapped Hole30
Fig. 12: Flange Connection ISO-K to ISO-F, Stud Screw and through Hole30
Attaching ISO-F Flange to ISO-F31
Fig. 13: Flange Connection ISO-F, Hexagon Head Screw and Tapped Hole31
Fig. 14: Flange Connection ISO-F, Hexagon Head Screw and through Hole31
Fig. 15: Flange Connection ISO-F, Stud Screw and Tapped Hole31
Attaching CF Flange to CF-F32
Fig. 16: Flange Connection ISO-F, Stud Screw and through Hole32
Fig. 17: Flange Connection CF-F, Hexagon Head Screw and through Hole32
Fig. 18: Flange Connection CF-F, Stud Screw and Tapped Hole33
Fig. 19: Flange Connection CF-F, Stud Screw and through Hole33
Filling the Operating Fluid34
Fig. 20: the Position of the Filler Screws Depends on the Mounting Orientation. Exam34
Connecting the Fore-Vacuum Side35
Fig. 22: Example of Fore-Vacuum Connection35
Connecting the Cooling Water Supply36
Tbl. 9: Requirements on the Cooling Water Composition36
Tbl. 10: Requirements on the Cooling Water Connection36
Connecting Accessories37
Fig. 23: Cooling Water Connection37
Connecting Sealing Gas38
Connecting the Electrical Supply38
Implement Electrical Safety Measures38
Grounding the Vacuum Pump39
Establishing the Electric Connection39
Fig. 24: Example: Connecting the Grounding Cable39
Tbl. 12: Terminal Lay-Out of the Power Supply Connector40
Operation41
Commissioning41
Tbl. 13: Preconfigured Settings for Turbopumps When Delivered41
Operating Modes42
Operation Without Operating Unit42
Operation Via Connection "E7442
Operation Via Multi-Function Connection "Remote42
Operation Via Pfeiffer Vacuum Display and Control Unit42
Operation Via Field Bus42
Switching on the Turbopump43
Operation Monitoring43
Operating Mode Display Via LED43
Temperature Monitoring44
Switching off and Venting44
Switching off44
Venting44
Tbl. 14: Behavior and Meaning of the Leds on the Electronic Drive Unit44
Tbl. 15: Factory Settings for Delayed Venting in Turbopumps45
Maintenance46
General Maintenance Information46
Maintenance Intervals and Responsibilities46
Changing the Operating Fluid47
Draining the Operating Fluid47
Fig. 25: Examples: Draining Operating Fluid for the Standard and U Versions47
Filling the Operating Fluid48
Fig. 26: the Position of the Filler Screws Depends on the Mounting Orientation. Exam48
Replacing the Electronic Drive Unit49
Removing Electronic Drive Unit50
Fig. 28: Removing the Electronic Drive Unit50
Installing the Electronic Drive Unit51
Fig. 29: Fitting the Electronic Drive Unit51
Fig. 30: Attaching the Electronic Drive Unit51
Confirming the Speed Specification52
Tbl. 16: Characteristic Nominal Rotation Speeds of the Turbopumps52
Decommissioning53
Stillsetzen für Längere Zeit53
Recommissioning53
Recycling and Disposal55
General Disposal Information55
Dispose of Turbopumps55
Malfunctions56
Service Solutions by Pfeiffer Vacuum58
Spare Parts60
Fig. 31: Spare Parts Hipace 120060
Accessories61
Accessory Information61
Ordering Accessories61
Tbl. 19: Accessories63
Technical Data and Dimensions64
General64
Technical Data64
Dimensions70
Fig. 32: Dimensions Hipace 1200 and Hipace 1200 C | DN 200 ISO-K70
Fig. 33: Dimensions Hipace 1200 and Hipace 1200 C | DN 200 ISO-F70
Fig. 34: Dimensions Hipace 1200 and Hipace 1200 C | DN 200 CF-F70
Fig. 35: Dimensions Hipace 1200 U and Hipace 1200 U C | DN 200 ISO-K71
Fig. 36: Dimensions Hipace 1200 U and Hipace 1200 U C | DN 200 ISO-F71
Fig. 37: Dimensions Hipace 1200 U and Hipace 1200 U C | DN 200 CF-F71
Declaration of Conformity72

Pfeiffer Vacuum PMP06021 - Page 76

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