RKI Instruments GD-70D Series - Page 89

- 89 - GD-70D
Detection Gas
Range
Calibration Instructions
IPA (Isopropyl alcohol) 0 - 2,000 ppm Calibrating with a Humidifier (MOS Sensors) on page 103
0 - 100 %LEL Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
N2O (Nitrous oxide) 0 - 500 ppm Calibrating with a Demand Flow Regulator on page 90
N2H4 (Hydrazine) 0 - 5.00 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
NF3 (Nitrogen trifluoride) 0 - 30.0 ppm Calibrating a Pyrolyzer Unit on page 107
NH3 (Ammonia) 0 - 75.0 ppm Calibrating with a Demand Flow Regulator on page 90
NO (Nitric oxide) 0 - 100 ppm Calibrating with a Demand Flow Regulator on page 90
NO2 (Nitrogen dioxide) 0 - 9.00 ppm Calibrating with a Demand Flow Regulator on page 90
0 - 15.0 ppm
O2 (Oxygen) 0 - 5.00% Calibrating with a Demand Flow Regulator on page 90
0 - 25.0% Calibrating with a Demand Flow Regulator on page 90
O3 (Ozone) 0 - 0.60 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
0 - 1.00 ppm
PH3 (Phosphine) 0 - 1.00 ppm Calibrating with a Demand Flow Regulator on page 90
R32 (Difluoromethane) 0 - 2,000 ppm Calibrating with a Humidifier (MOS Sensors) on page 103
0 - 5,000 ppm
0 - 9,000 ppm
R41 (Fluoromethane) 0 - 2,000 ppm Calibrating with a Humidifier (MOS Sensors) on page 103
TEOS (Tetraethyl orthosilicate) 0 - 15.0 ppm Calibrating a Pyrolyzer Unit on page 107
TMA (Trimethylamine) 0 - 15.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
TMB (Trimethoxy borane) 0 - 1000 ppm Calibrating a Pyrolyzer Unit on page 107
TMS (Tetramethyl silane) 0 - 15.0 ppm Calibrating a Pyrolyzer Unit on page 107
TRIMS (Trimethyl silane) 0 - 15.0 ppm Calibrating a Pyrolyzer Unit on page 107
Si2H6 (Disilane) 0 - 15.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
SiCl4 (Silicon tetrachloride) 0 - 15.0 ppm Calibrating with a Gas Bag (Calibrating with HCl) on page 99
SiH4 (Silane) 0 - 15.0 ppm Calibrating with a Demand Flow Regulator on page 90
SO2 (Sulphur dioxide) 0 - 6.00 ppm Calibrating with a Demand Flow Regulator on page 90