GD-70D - 88 -
COF2 (Cobalt difluorine) 0 - 6.00 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
DEA (Diethylamine) 0 - 15.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
DMA (Dimethylamine) 0 - 15.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
F2 (Fluorine) 0 - 1.00 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
0 - 3.00 ppm
GeH4 (Germane) 0 - 0.80 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
H2 (Hydrogen)
0 - 100 %LEL Calibrating with a Demand Flow Regulator on page 90
0 - 2.00 %volume Calibrating with a Humidifier (MOS Sensors) on page 103
0 - 500 ppm
0 - 1,000 ppm
0 - 2,000 ppm
0 - 4,000 ppm
H2Cl2Si (Dichlorosilane) 0 - 15.0 ppm Calibrating with a Gas Bag (Calibrating with HCl) on page 99
H2O2 (Hydrogen peroxide) 0 - 3.00 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
H2S (Hydrogen sulfide) 0 - 1.00 ppm Calibrating with a Demand Flow Regulator on page 90
0 - 30.0 ppm
H2Se (Hydrogen selenide) 0 - 0.20 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
H9NSi3 (Trisilylamine) 0 - 15.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
HBR (Hydrogen bromide) 0 - 6.00 ppm Calibrating with a Gas Bag (Calibrating with HCl) on page 99
0 - 9.00 ppm
HCl (Hydrogen chloride) 0 - 6.00 ppm Calibrating with a Gas Bag (Calibrating with HCl) on page 99
0 - 15.0 ppm
HCN (Hydrogen cyanide) 0.9 - 15.0 ppm Calibrating with a Demand Flow Regulator on page 90
HCOOH (Formic acid) 0 - 15.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
HF (Hydrogen fluoride) 0.4 - 3.00 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
0.4 - 9.00 ppm
HNO3 (Nitric acid) 0 - 20.0 ppm Calibrating with a Surrogate Gas (Sensors with Factors) on
page 93
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