HRX-OM-Q026 
Contents 
  HRSH Series 
 
 
3.3.5  Wiring of run/stop signal input and remote signal input ..................................................... 3-19 
3.3.6  Wiring of external switch signal input ................................................................................ 3-22 
3.3.7  Wiring of contact output signal .......................................................................................... 3-25 
3.3.8  RS-485 communication wiring ........................................................................................... 3-26 
3.3.9  RS-232C communication wiring ........................................................................................ 3-27 
3.4  Piping ...................................................................................................................... 3-28 
3.5  Circulating Fluid Supply ........................................................................................ 3-31 
3.5.1  Automatic water fill function ............................................................................................... 3-31 
3.5.2  Fluid supply without using the automatic water fill function ............................................... 3-33 
3.5.3  Option K “Water fill port” .................................................................................................... 3-35 
3.5.4  Option M “Applicable to deionized water piping” ............................................................... 3-35 
Chapter 4  Starting the Product ......................................................... 4-1 
4.1  Before Starting ......................................................................................................... 4-1 
4.2  Preparation for Start ................................................................................................ 4-2 
4.2.1  Power supply ....................................................................................................................... 4-2 
4.2.2  Option B “Earth leakage breaker” ........................................................................................ 4-2 
4.2.3  HRSH--20-B1 HRSH--20-S and HRSH--40- .......................................... 4-3 
4.2.4  Setting of circulating fluid temperature ................................................................................ 4-3 
4.2.5  Setting of pump operation mode ......................................................................................... 4-3 
4.3  Preparation of Circulating Fluid Supply to User’s Equipment .............................. 4-4 
4.4  Operation Start and Stop ......................................................................................... 4-7 
4.4.1  Starting the product ............................................................................................................. 4-7 
4.4.2  Stopping the product ............................................................................................................ 4-8 
4.5  Check Items during Startup .................................................................................... 4-9 
4.6  Adjustment of Circulating Fluid Flow Rate ............................................................ 4-9 
Chapter 5  Display and Setting of Various Functions ...................... 5-1 
5.1  List of Functions ...................................................................................................... 5-1 
5.2  Function.................................................................................................................... 5-2 
5.2.1  Key operations ..................................................................................................................... 5-2 
5.2.2  List of parameters ................................................................................................................ 5-4 
5.3  Main Display ............................................................................................................. 5-7 
5.3.1  Main display ......................................................................................................................... 5-7 
5.3.2  Items on the main display .................................................................................................... 5-7 
5.4  Alarm Menu .............................................................................................................. 5-8 
5.4.1  Alarm menu ......................................................................................................................... 5-8 
5.4.2  Items shown on the alarm menu display ............................................................................. 5-8 
5.5  Check Monitor Menu ................................................................................................ 5-9 
5.5.1  Check monitor menu ............................................................................................................ 5-9 
5.5.2  Checking with the check monitor menu ............................................................................... 5-9