Series 65 DESIGN AND FUNCTION
963283EA Edition 2019-05-03 15/
3.2 Function
The valve plate acts, due to its pendulum motion, as a throttling element and varies the conductance
of the valve opening. The integrated controller calculates the required plate position to achieve the set
point pressure. Actuation is performed by a stepper motor. An encoder monitors the position. This
principle ensures fast and accurate process pressure control.
For opening or control the “sealing ring” is lifted pneumatically by “compressed air”, afterwards the
“pendulum plate” moves to open or do pressure control. For leak tight closing, the “sealing ring”
moves downwards and press the pendulum plate to valve body for “isolation”. Closing is performed by
“springs”.
“open /
pressure
control”
“isolation”
close
sealing ring
pendulum plate
“compressed air”
sealing ring
pendulum plate
springs
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